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MACHINED PARTS
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Product name/equipment name
high temperature heater
Product Description/Overview
■ Stable maintenance of high temperature of 600 degrees C
It can stably maintain a high temperature of 600 degrees. Heater surface temperature accuracy is within ±2%.
■Because heater is thin, it is superior in temperature response.
Temperature can be raised from 20 to 600 degrees within 10 minutes.
■ Low dust generation
The heater material is low dust generation, so it corresponds to class 10.
Main destination
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Semiconductor manufacturing process
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FPD device array process
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Organic EL process
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coater diler lopper
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baking furnace
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Annealing Furnace/Flat Glass Firing Furnace
specification
temperature zone
Maximum 600℃
Correspondence size
Width: Max 1000mm
Length: up to 2000mm
Thickness: 6~10mm (excluding metal case)
heating rate
Watt Density: Max 3.0W1/㎡
power density
⊿T: Max 2.5°C/sec
temperature accuracy
Heater surface temperature ±2% / ℃
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 高温ヒーター |
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